Sephaphatha se entsoe ka silicon e hloekileng (Si).Ka kakaretso e arotsoe ka lintlha tse 6-inch, 8-inch, le 12-inch, sephaphatha se hlahisoa ho ipapisitsoe le sephaphatha sena.Li-wafers tsa silicon tse lokiselitsoeng ho tsoa ho li-semiconductors tse hloekileng haholo ka lits'ebetso tse joalo ka ho hula ka kristale le ho seha li bitsoa li-wafers beca.sebelisa li na le sebopeho se chitja.Mehaho e fapaneng ea li-circuit element e ka sebetsoa ho li-wafers tsa silicon hore e be lihlahisoa tse nang le thepa e ikhethang ea motlakase.lihlahisoa tsa potoloho tse sebetsang hantle.Li-wafers li feta letotong la lits'ebetso tsa tlhahiso ea semiconductor ho theha meaho e menyane haholo ea potoloho, ebe e ea khaoloa, ea pakoa ebe e lekoa hore e be li-chips, tse sebelisoang haholo lisebelisoa tse fapaneng tsa elektroniki.Lisebelisoa tsa Wafer li bile le lilemo tse fetang 60 tsa tsoelo-pele ea theknoloji le nts'etsopele ea indasteri, ho theha boemo ba indasteri bo laoloang ke silicon mme bo tlatselletsoa ke lisebelisoa tse ncha tsa semiconductor.
80% ea lifono le likhomphutha tsa lefats'e li hlahisoa China.China e itšetlehile ka thepa e tsoang kantle ho naha bakeng sa 95% ea lichifi tsa eona tse sebetsang hantle haholo, kahoo China e sebelisa US$220 bilione selemo se seng le se seng ho reka li-chips, e leng palo e habeli ea oli ea selemo le selemo ea China.Lisebelisoa tsohle le lisebelisoa tse amanang le mechine ea photolithography le tlhahiso ea li-chip li boetse li koetsoe, tse kang li-wafers, litšepe tse hloekileng haholo, mechine ea etching, joalo-joalo.
Kajeno re tla bua ka bokhuts'oane ka molao-motheo oa ho hlakoloa ha leseli la UV ea mechini ea liphaephe.Ha u ngola lintlha, hoa hlokahala ho kenya tefiso ka hekeng e phaphametseng ka ho sebelisa VPP e phahameng ea motlakase hekeng, joalokaha ho bontšitsoe setšoantšong se ka tlase.Kaha tefiso e kenngoeng ha e na matla a ho phunyeletsa lerako la matla la filimi ea silicon oxide, e ka boloka boemo ba maemo feela, kahoo re tlameha ho fana ka tefiso matla a itseng!Ke nako eo khanya ea ultraviolet e hlokahalang.
Ha heke e phaphametseng e fumana mahlaseli a ultraviolet, lielektrone tse hekeng e phaphametseng li fumana matla a khanya ea ultraviolet quanta, 'me lielektrone li fetoha lielektrone tse chesang tse nang le matla a ho phunyeletsa leboteng la matla la filimi ea silicon oxide.Joalokaha ho bontšitsoe setšoantšong, li-electrone tse chesang li kenella ka filimi ea silicon oxide, li phallela substrate le heke, ebe li khutlela sebakeng se hlakotsoeng.Ts'ebetso ea ho hlakola e ka etsoa feela ka ho amohela mahlaseli a ultraviolet, 'me e ke ke ea hlakoloa ka mokhoa oa elektroniki.Ka mantsoe a mang, palo ea likotoana e ka fetoloa feela ho tloha "1" ho ea ho "0", 'me ka lehlakoreng le leng.Ha ho na tsela e 'ngoe haese ho hlakola litaba tsohle tsa chip.
Rea tseba hore matla a leseli a lekana le bolelele ba maqhubu a leseli.E le hore lielektrone li fetohe lielektrone tse chesang 'me kahoo li be le matla a ho phunyeletsa filimi ea oxide, ho khanya ha leseli ka bolelele bo khutšoanyane, ke hore, mahlaseli a ultraviolet, a hlokahala haholo.Kaha nako ea ho hlakola e itšetlehile ka palo ea photon, nako ea ho hlakola e ke ke ea khutsufatsoa esita le ka nako e khutšoanyane ea wavelengths.Ka kakaretso, ho hlakola ho qala ha wavelength e le haufi le 4000A (400nm).Ha e le hantle e fihla ho saturation ho pota 3000A.Ka tlase ho 3000A, leha bolelele ba maqhubu bo le khuts'oane, bo ke ke ba ba le tšusumetso ho nako ea ho hlakola.
Tekanyetso ea ho hlakoloa ha UV ka kakaretso ke ho amohela mahlaseli a ultraviolet ka bolelele bo nepahetseng ba 253.7nm le matla a ≥16000 μ W /cm².Ts'ebetso ea ho hlakola e ka phethoa ka nako ea ho pepeseha ho tloha ho metsotso e 30 ho isa ho lihora tse 3.
Nako ea poso: Dec-22-2023